D4EX03531 - KE - TS TECH

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D4EX03531

Furnace Vendor	KE(Hitachi Kokusai)
Heater Model	D4EX03531
Max Temperature	850°C
Wafer Size	8 Inch
Process	H2 Sinter,Metal Anneal
Process Temp	800°C

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2105-220649-51
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