VOS-56-101 - TEL - TS TECH

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VOS-56-101

Furnace Vendor	TEL(Tokyo Electron)
Heater Model	VOS-56-101
Max Temperature	1000°C
Wafer Size	12 Inch
Process	LP-CVD POLY
Process Temp	900°C

Please indicate the source of the reprint（VOS-56-101:/companynews/422)

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