VOS-40-017 - TEL - TS TECH

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VOS-40-017

Furnace Vendor	TEL(Tokyo Electron)
Heater Model	VOS-40-017
Max Temperature	1000°C
Wafer Size	8 Inch
Process	Oxidation
Process Temp	700°C-900°C

Please indicate the source of the reprint（VOS-40-017:/companynews/422)

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