VOS-56-003 - TEL - TS TECH

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VOS-56-003

Furnace Vendor	TEL(Tokyo Electron)
Heater Model	VOS-56-003
Max Temperature	1000°C
Wafer Size	12 Inch
Process	Oxidation
Process Temp	900°C

Please indicate the source of the reprint（VOS-56-003:/companynews/422)

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