VMU-40-007EX - TEL - TS TECH

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VMU-40-007EX

Furnace Vendor	TEL(Tokyo Electron)
Heater Model	VMU-40-007EX
Max Temperature	1250°C
Wafer Size	8 Inch
Process	Oxidation,Anneal,Diffusion
Process Temp	1050°C(High Temp)

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