VMM-40-101 - TEL - TS TECH

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VMM-40-101

Furnace Vendor	TEL(Tokyo Electron)
Heater Model	VMN-40-101
Max Temperature	900°C
Wafer Size	8 Inch
Process	LPCVD-Nitride,POLY,TEOS
Process Temp	800°C(Middle Temp)

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